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0010-71998 SUSCEPTOR 5500
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0010-72126 SUSCEPTOR 5500 TYPE ‘B’
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0015-01297 FEEDTHROUGH GII 30KV
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0015-66433 SUSCEPTOR 1600
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0015-66973 SUSCEPTOR 1600 (370*400)
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0015-70086 SCREW SST-PE CVD 4300
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0015-72669 SUSCEPTOR 1600(MOD)
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0020-00728 CATHODE CLAMP RING HEXODE
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0020-01271 PLATE PUMPING 200MM WXZ+
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0020-01494 CHAMBER LID
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0020-04036 BASE FLANGE
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0020-04043 BOTTOM PLATE
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0020-04076 PLATE GAS DISTRIBUTION SMALL HOLES AND
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0020-04164 CARRIER 200MM(EXT.CAT.)
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0020-04189 TOP ADAPTOR
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0020-06232 PEDESTAL 4″
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0020-07180 CONDUCTOR BIAS 300MM HDPCVD ULTIMA
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0020-08753 BRACKET X-ADJUST WALKING BEAM INPUT GR
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0020-09069 LIFTING PIN VITON TIP
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0020-09107 HINGE RT SLIT VALVE CHAM
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