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FC-980C MFC 50 SCCM HE
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FC-980C MFC 1%PH3/N2 100 SCCM
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FC-980C MFC O2 2 SLM
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FC-980C MFC CF4 200 SCCM
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FC-980C MFC CF4 100 SCCM
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FC-980C MFC AR 1 SLM
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FC-980C MFC O2 20SCCM
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FC-980C MFC CHF3 300SCCM
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FC-980C MFC CHF3 100SCCM
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FC-980C MFC CF4 50SCCM
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FC-980C MFC N2 300SCCM
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FC-980C MFC O2 300SCCM
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FC-980C MFC H2 300SCCM
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FC-980C MFC CH2F2 20SCCM
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FC-980C MFC CHF3 100SCCM
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