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60 Products
0020-20896 REFLECTOR HEATER 5/6″ DEGAS
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0690-01113 CLAMP FLG SGL-CLAW NW6380100 AL 5/16-1
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0500-01027 BLANK MODULE ION GAUGE CHASSIS
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0270-77036 SHIPPING RESTRAINT MIRRA ROBOT
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0020-20895 BASE HEATER 5/6″ DEGAS
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0020-20815 PLATE CASSETTE 150MM
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0020-20781 SCREEN MONOLITH BUF/XFER CHAMBER CRYOPUM
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0020-20510 HOUSING HTR PKG
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0020-20431 COLLIMATOR 6INCH
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0020-20390 ARM FROG LEG
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0020-20356 CAP 8INCH BLADE FROG LEG
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0020-20354 CAP 6INCH BLADE FROG LEG
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0020-20295 FRAME SOURCE 11.30INCH
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0020-20164 COVER INSULATOR SOURCE 11.30″
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0020-20159 PLATE
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0020-20124 PLUNGER DC BIAS CHAMBER
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0020-20115 SCREW ISOLATOR DC BIAS
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0020-20074 PANEL
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0020-20023 OUTCASE
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0020-13336 COVER ORIENTER CHAMBER
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0020-10943 ISOLATOR TEFLON 200MM
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0020-10759 COVER FRONT
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0020-10758 HOUSING TC AMP
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0020-10721 COVER SCREW TEFLON THIN PERF PLATE
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0020-10403 PUMPING PLATE 4″5″&6″ SILANE/OX
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0020-10402 PUMPING PLATE 200MM
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0020-10190 PLATE CONNECTOR SACVD/WB
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0020-10189 PLATE CONNECTOR 200MM
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0020-10185 SUPPORT HOOP 200MM
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0020-09999 PLATE FRONT THROTTLE DR.
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0020-09885 ISOLATOR N
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0020-09609 BUSHING TERMINAL
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0020-09604 HOUSING
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0270-76908 CAL TOOL B101 LIFT TO ROBOT 6″
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Details
0270-76079 INSERT 6″ CASSETTE HANDLER SHIPPING CLAMP
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0270-76077 CLAMP 8″/6″ CASSETTE HANDLER SHIPPING
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0270-35395 ASSEMBLY VIEW LID W/ GUARD DXZ
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0270-35355 JIG ROBOT/INDXR CALIB 200MM SMIF-PRODU
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0270-35354 JIG CAL ROBOT COLLAR CNTRG 300MM FE-PR
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0270-35199 TOOL COVER REFLECTOR PLATE MOD I RTP
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0270-35187 WAFER CALIBRATION OTF 200MM FRONT END
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0270-35134 ASSEMBLY VIEW LID TXZ
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0270-35098 TOOL PROBE WRENCH MOD II
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0270-35058 CLAMP SHIP CHAMBER/LID WXZ
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0270-20088 TOOL PRECLEAN II 8″ ROBOT ALIGNMENT
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0270-20069 JIG 8″ CASS INDEXER TO ROBOT CAL PLATE
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0270-20044 TOOL CALIB. ORIENTER 8″ SEE
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0270-20037 TOOL INDEXER CALIB. BAR
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0270-18073 COLLAR 200MM ULTIMA HDP-CVD
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0270-18038 BLANKOFF REMOTE PLASMA PORT ULTIMA
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0270-09228 TOOL PLATE LID BAFFLE PURGE
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0270-09227 TOOL PLATE LID COVER WXZ
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0270-05576 TOOL DUMMY COIL SHIELD-COIL ASSY 300MM SIP ENCORE TAN
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0270-04796 JIG
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0270-04034 SUPPORT PLATE SHIPPING U-FRAME ULTIMA 200MM
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0270-04033 SUPPORT PLATE SPACER SHIPPING U-FRAME ULTIMA 200
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0270-01726 LIFT
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0270-01597 U-FRAME PRODUCER 200 & 300MM CH & LL
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0270-01143 FICTURE FORK TUBE 200MM CLEANER
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0270-00289 TOOL VHP ZERO PLATE
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