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60 Products
0020-10669 PORT VACUUM WB
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0020-10590 MANIFOLD INPUT BW
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0020-10202 PLATE SLIT VALVE CHAMBER
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0020-10120 PLATE PERF 100-150MM S/O
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0020-09434 HOUSING PLUG
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0020-09433 PLUG CONN
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0020-09432 COVER HOUSING PLUG
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0020-09108 HINGE LT SLIT VALVE CHAM
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0020-09107 HINGE RT SLIT VALVE CHAM
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0020-09069 LIFTING PIN VITON TIP
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0020-08753 BRACKET X-ADJUST WALKING BEAM INPUT GR
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0020-07180 CONDUCTOR BIAS 300MM HDPCVD ULTIMA
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0020-06232 PEDESTAL 4″
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0020-04189 TOP ADAPTOR
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0020-04164 CARRIER 200MM(EXT.CAT.)
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0020-04076 PLATE GAS DISTRIBUTION SMALL HOLES AND
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0020-04043 BOTTOM PLATE
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0020-04036 BASE FLANGE
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0020-01494 CHAMBER LID
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0020-01271 PLATE PUMPING 200MM WXZ+
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0020-00728 CATHODE CLAMP RING HEXODE
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0015-72669 SUSCEPTOR 1600(MOD)
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0015-70086 SCREW SST-PE CVD 4300
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0015-66973 SUSCEPTOR 1600 (370*400)
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0015-66433 SUSCEPTOR 1600
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0015-01297 FEEDTHROUGH GII 30KV
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0010-72126 SUSCEPTOR 5500 TYPE ‘B’
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0010-71998 SUSCEPTOR 5500
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0010-71995 SUSCEPTOR 5500 TYPE ‘A’
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0010-71866 SUSCEPTOR 15K
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0010-71557 ASSY SUSCEPTOR WELDED 6061 620X750 4300A
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0010-71552 SUSCEPTOR 3900
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0010-60011 6INCH TEOS SUSCEPTOR
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0010-37140 ASSY THROTTLE VALVE DUAL SPRING DXZ
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0010-36160 ASSY CERAMIC RING AND PLATE LIFT TUBE
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0010-17425 ASSY PROCESS KIT 300MM SIP ENCORE TA
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0010-13833 UPPER CHAMBER DPS POLY VITON
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0010-10761 ASSY SSGD LID MXP & MKII CHBR VCR PO
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0010-10621 ASSY TOP LID SSGD MXP CENTURA/M ETCH 5000
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0010-10032 TOP COVER ASSY ETCH CHAMBER UNIVERSAL
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0010-09900 PEDESTAL ASSY 150MM EXT CATHODE
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0010-09540 CHAMBER WALL
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0010-09443 BASIC CHAMBER 4 5 6″ TEOS/SIL OX
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0010-09035 ASSY BWCVD THROTTLE VALVE 100 125 /150MM
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0010-05256 OUTSOURCED ASSY HEATER 6INCH DXZ
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0020-40084 HOLDER WIPER INDEXER
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3D10-150388-11 ESC ELECTRODE BTM 12Y HT
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15-00702-00 Plate Fork Top 200mm Wafer
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27-953668-00 Milipore Throttle Valve controller
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03-104133-00 Cable Assy PS AC Power LPB
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03-104134-00 Cable Assy PS DC Power LPB
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60-024118-00 Monovat Seat 16x236mm
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15-134732-00 Hub 200mm ped concentric lift
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17-163201-00 Power Supply 24V 2.2A Cosel
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60-10006-00 Gauge Convectron DO w/VCR
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20-00452-00 E-Ring 1/2″
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27-132575-00 Display 12in Flat Panel
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60-00171-00 Flow control 1/4 Tube 1/4 NPT
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15-110411-00 Window Sapphire
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15-110413-00 Clamp Chamber Viewport Short
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